Excimer Gas Mixtures
Excimer gas mixtures consist of combinations of rare gases and halogen gases. Different mixtures will produce different wave lengths in the laser.
- Fluorine + Argon – 193 nm.
- Fluorine + Krypton – 248 nm
- Fluorine + Xenon – 351 nm
- Hydrogen Chloride + Xenon – 308 nm
- Hydrogen Chloride + Krypton – 222 nm